The Hunt for High-k Gate Dielectrics: A Materials Perspective

MTL Seminar Series
Glen Wilk, ASM
Glen Wilk, ASM

Abstract

As the semiconductor industry is now entering the Angstrom era, novel materials are the key to enabling continued scaling toward future device nodes. This presentation will give a historical perspective on the crucial role that materials discovery and development played in finding a high-k replacement for silicon dioxide as the gate dielectric in CMOS.

Current and future challenges, as well as opportunities, for materials solutions will be highlighted for both Logic and Memory applications.