Glossary and Acronyms

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Click one of the letters above to advance the page to terms beginning with that letter.

6

6.152j

EECS course "Microelectronic Processing Technology." Prerequisite for Using the Microsystems Technology Laboratories' fabrication facilities.

A

Admin

Shorthand for "administrative assistant."

another

Another term shown on glossary page.

AO

Administrative Officer

B

Booties

Shoe covers

Bunnysuits

White suits worn in cleanrooms. Also known as cleanroom suits and cleanroom gowns.

C

CAD

Computer-Aided Design

ChemE

Department of Chemical Engineering (Link)

CHP

Chemical Hygiene Plan

CICS

Center for Integrated Circuits and Systems (Link)

CIM

 Computer Integrated Manufacturing

CMOS

Complementary Metal Oxide Semiconductor

CMP

Chemical-Mechanical Polishing

CORAL

Common Object Representation for Advanced Laboratories. Suite of software tools designed to help with the management and operation of MTL. (Link)

D

DACCA

Consolidated Salary Expense Analysis (a monthly payroll report)

DICS

Digital Integrated Circuits and Systems

DLC

Departments, Labs, and Centers

DMSE

Department of Materials Science and Engineering (Link)

DOT

Department of Transportation

E

EBL

Electron Beam Lithography Laboratory

EDA

Electronic Design Automation

EECS

Department of Electrical Engineering and Computer Science (Link)

EHS

Environmental Health & Safety Office. Overseers of safety policy at MIT. Also known as EH&S. (Link)

EML

Exploratory Materials Laboratory. Located on fifth floor of Building 39. Broad range of devices fabricated here.

EPA

Environmental Protection Agency

ERT

Emergency Response Team

example
Here's an example description.

F

Fab

Shorthand term for Fabrication Facilities

FFA

Fabrication Facilities Access (Link)

FO

Fiscal Officer

H

HF

Hydrofluoric Acid

I

IAB

Industrial Advisory Board (Link)

ICL

Integrated Circuits Laboratory. Located on second floor of Building 39. Class 10 cleanroom. CMOS and CMOS-compatible devices fabricated here.

Identicard

Thin plastic card with magnetic stripe. These cards are used for access to lab and other restricted areas. (Link)

Identicard form

Form used for requesting and updating a user's lab/restricted area access.

ITRC

Intelligent Transportation Research Center

J

JV

Journal voucher

M

Machine Charge Chart

Matrix detailing what the usage rates are for MTL equipment. (Link)

MechE

Department of Mechanical Engineering (Link)

MEMS

Micro-electro Mechanical Systems

MEMS@MIT

MEMS@MIT is a research group focusing on MEMS.

MIG

Microsystems Industrial Group (Link)

MIT

Massachusetts Institute of Technology (Link)

MOSFET

Metal Oxide Semiconductor Field-Effect Transistor

MSD

Materials, Structures and Devices Focus Center

MSDS

Material Safety Data Sheets

MTL

Microsystems Technology Laboratories

MUMMS

MTL User Machine Management System (Link)

N

NFPA

National Fire Protection Association

O

OSHA

Occupational Safety and Health Administration

P

PI

Principal Investigator

Process Flow Matrix

Matrix made by the PTC to illustrate MTL machine capabilities. (Link)

Process Unit

Measurement used within MTL to determine cost of machine usage and process variables.

PTC

Process Technology Committee

R

RGL

Research Group Laboratories

S

Safety Diamond

Symbol used by the NFPA to classify various hazard ratings. The diamond is broken into four sections. Numbers in the three colored sections range from 0 (least severe hazard) to 4 (most severe hazard). The fourth (white) section is left blank and is used only to denote special fire fighting measures/hazards. also known as the NFPA Safety Diamond.

Si

Symbol for the element silicon

SOE

School of Engineering. Also abbreviated as SoE. (Link)

SOI

Silicon-on-Insulator

SOP

Standard Operating Procedure

SPR

Semiconductor Process Representation

T

TCAD

Technology Computer-Aided Design

TNA

Training Needs Assessment

TRL

Technology Research Laboratories. Located on fourth floor of Building 39. Class 100 cleanroom. CMOS-compatible, optoelectronic, MEMS devices fabricated here.

U

User

Commonly meant to refer to those Using MTL's fabrication facilities.

UWB

Ultra Wide Band

V

VLSI

Very-Large-Scale Integration

VLSI Seminars

Semi-weekly seminar series held in the spring and fall, hosted by MTL. (Link)

W

Wafer

A small thin circular slice of a semiconducting material, such as pure silicon or quartz, on which an integrated circuit can be formed.

Μ

µAMPS

Micro-Adaptive Multi-domain Power-aware Sensors