Glossary and Acronyms

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6

6.152j: EECS course "Microelectronic Processing Technology." Prerequisite for Using the Microsystems Technology Laboratories' fabrication facilities.

Booties: Shoe covers
Bunnysuits: White suits worn in cleanrooms. Also known as cleanroom suits and cleanroom gowns.

CAD: Computer-Aided Design
ChemE: Department of Chemical Engineering (Link)
CHP: Chemical Hygiene Plan
CICS: Center for Integrated Circuits and Systems (Link)
CIM: Computer Integrated Manufacturing
CMOS: Complementary Metal Oxide Semiconductor
CMP: Chemical-Mechanical Polishing
CORAL: Common Object Representation for Advanced Laboratories. Suite of software tools designed to help with the management and operation of MTL. (Link)

EBL: Electron Beam Lithography Laboratory
EDA: Electronic Design Automation
EECS: Department of Electrical Engineering and Computer Science (Link)
EHS: Environmental Health & Safety Office. Overseers of safety policy at MIT. Also known as EH&S. (Link)
EML: Exploratory Materials Laboratory. Located on fifth floor of Building 39. Broad range of devices fabricated here.
EPA: Environmental Protection Agency
ERT: Emergency Response Team
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IAB: Industrial Advisory Board (Link)
ICL: Integrated Circuits Laboratory. Located on second floor of Building 39. Class 10 cleanroom. CMOS and CMOS-compatible devices fabricated here.
Identicard: Thin plastic card with magnetic stripe. These cards are used for access to lab and other restricted areas. (Link)
Identicard form: Form used for requesting and updating a user's lab/restricted area access.
ITRC: Intelligent Transportation Research Center

Machine Charge Chart: Matrix detailing what the usage rates are for MTL equipment. (Link)
MechE: Department of Mechanical Engineering (Link)
MEMS: Micro-electro Mechanical Systems
MEMS@MIT: MEMS@MIT is a research group focusing on MEMS.
MIG: Microsystems Industrial Group (Link)
MIT: Massachusetts Institute of Technology (Link)
MOSFET: Metal Oxide Semiconductor Field-Effect Transistor
MSD: Materials, Structures and Devices Focus Center
MSDS: Material Safety Data Sheets
MTL: Microsystems Technology Laboratories
MUMMS: MTL-NANO User Machine Management System (Link)

PI: Principal Investigator
Process Flow Matrix: Matrix made by the PTC to illustrate MTL machine capabilities. (Link)
Process Unit: Measurement used within MTL to determine cost of machine usage and process variables.
PTC: Process Technology Committee

Safety Diamond: Symbol used by the NFPA to classify various hazard ratings. The diamond is broken into four sections. Numbers in the three colored sections range from 0 (least severe hazard) to 4 (most severe hazard). The fourth (white) section is left blank and is used only to denote special fire fighting measures/hazards. also known as the NFPA Safety Diamond.
Si: Symbol for the element silicon
SOE: School of Engineering. Also abbreviated as SoE. (Link)
SOI: Silicon-on-Insulator
SOP: Standard Operating Procedure
SPR: Semiconductor Process Representation

TCAD: Technology Computer-Aided Design
TNA: Training Needs Assessment
TRL: Technology Research Laboratories. Located on fourth floor of Building 39. Class 100 cleanroom. CMOS-compatible, optoelectronic, MEMS devices fabricated here.

VLSI: Very-Large-Scale Integration
VLSI Seminars: Semi-weekly seminar series held in the spring and fall, hosted by MTL. (Link)

Wafer: A small thin circular slice of a semiconducting material, such as pure silicon or quartz, on which an integrated circuit can be formed.