Timeline

1960
  • Semiconductor Electronics Education Committee (SEEC) established.
1968
  • Integrated Microelectronics Laboratory (“Microlab”) opens in Building 13.
1977
  • Submicron Structures Laboratory (SSL) established in Building 13, rechristened NanoStructures Laboratory (NSL) in 1994.
1978
  • First offering of Introduction to VLSI Systems, a multi-project chip design course.
1979
  • MIT VLSI Seminar launched (renamed MTL Seminar in 2007).
1980
  • MIT announces plans for establishing MTL (originally termed LSI Fabrication Facility).
1982
  • Weekly lunch meeting (“microlunch”) of microsystems faculty starts; it continues to this day
198419861989
  • Full CMOS process qualification of ICL achieved.
  • CAFE (Computer Aided Fabrication Environment) software system developed.
1991
  • Process Technology Committee established.
1994199519981999
  • Bldg. 13 Microlab moves to Building 39 and becomes Exploratory Materials Laboratory (EML).
2000
  • Class 1 Committee report on MTL fab operations issued.
2001
  • 4” to 6” wafer diameter conversion completed.
20022003
  • CORAL fab management software system deployed (replacing CAFE).
2009201220142018