- Semiconductor Electronics Education Committee (SEEC) established.
- Integrated Microelectronics Laboratory (“Microlab”) opens in Building 13.
- Submicron Structures Laboratory (SSL) established in Building 13, rechristened NanoStructures Laboratory (NSL) in 1994.
- First offering of Introduction to VLSI Systems, a multi-project chip design course.
- MIT VLSI Seminar launched (renamed MTL Seminar in 2007).
- MIT announces plans for establishing MTL (originally termed LSI Fabrication Facility).
- Weekly lunch meeting (“microlunch”) of microsystems faculty starts; it continues to this day
- Microsystems Industrial Group launched.
- MTL opens, reporting to Department of Electrical Engineering and Computer Science; initial set of labs:
- Building 39 dedicated as Gordon Stanley Brown Building.
- Full CMOS process qualification of ICL achieved.
- CAFE (Computer Aided Fabrication Environment) software system developed.
- Process Technology Committee established.
- MTL and NSL spawn Space Nanotechnology Laboratory in Building 37.
- MTL reporting moves to School of Engineering.
- Center for Integrated Circuits and Systems established.
- Bldg. 13 Microlab moves to Building 39 and becomes Exploratory Materials Laboratory (EML).
- Class 1 Committee report on MTL fab operations issued.
- 4” to 6” wafer diameter conversion completed.
- Microsystems Affiliate Program for industrial users established, renamed Fabrication Facilities Access Program in 2004.
- CORAL fab management software system deployed (replacing CAFE).
- Electron Beam Lithography Facility (EBL) established in Building 24; managed jointly with the Research Laboratory of Electronics (RLE).
- MIT.nano, a new 200,000-square-foot center for nanoscience and nanotechnology, announced.
- MTL 30 year celebration takes place.
- MIT.Nano opens, MTL becomes "fabless."