- Semiconductor Electronics Education Committee (SEEC) established.
- Integrated Microelectronics Laboratory (“Microlab”) opens in Building 13.
- Submicron Structures Laboratory (SSL) established in Building 13, rechristened NanoStructures Laboratory (NSL) in 1994.
- First offering of Introduction to VLSI Systems, a multi-project chip design course.
- MIT VLSI Seminar launched (renamed MTL Seminar in 2007).
- MIT announces plans for establishing MTL (originally termed LSI Fabrication Facility).
- Weekly lunch meeting (“microlunch”) of microsystems faculty starts; it continues to this day
Microsystems Industrial Group launched.
MTL opens, reporting to Department of Electrical Engineering and Computer Science; initial set of labs:
Building 39 dedicated as Gordon Stanley Brown Building.
Full CMOS process qualification of ICL achieved.
CAFE (Computer Aided Fabrication Environment) software system developed.
Process Technology Committee established.
MTL and NSL spawn Space Nanotechnology Laboratory in Building 37.
- MTL reporting moves to School of Engineering.
Center for Integrated Circuits and Systems established.
Bldg. 13 Microlab moves to Building 39 and becomes Exploratory Materials Laboratory (EML).
Class 1 Committee report on MTL fab operations issued.
- 4” to 6” wafer diameter conversion completed.
Microsystems Affiliate Program for industrial users established, renamed Fabrication Facilities Access Program in 2004.
CORAL fab management software system deployed (replacing CAFE).
Electron Beam Lithography Facility (EBL) established in Building 24; managed jointly with the Research Laboratory of Electronics (RLE).
MIT.nano, a new 200,000-square-foot center for nanoscience and nanotechnology, announced.
- MTL 30 year celebration takes place.
- MIT.Nano opens, MTL becomes "fabless."