1960
- Semiconductor Electronics Education Committee (SEEC) established.
1968
- Integrated Microelectronics Laboratory (“Microlab”) opens in Building 13.
1977
- Submicron Structures Laboratory (SSL) established in Building 13, rechristened NanoStructures Laboratory (NSL) in 1994.
1978
- First offering of Introduction to VLSI Systems, a multi-project chip design course.
1979
- MIT VLSI Seminar launched (renamed MTL Seminar in 2007).
- Dimitri Antoniadis appointed as first director.
1980
- MIT announces plans for establishing MTL (originally termed LSI Fabrication Facility).
1982
- Weekly lunch meeting (“microlunch”) of microsystems faculty starts; it continues to this day
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Microsystems Industrial Group launched.
1984
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MTL opens, reporting to Department of Electrical Engineering and Computer Science; initial set of labs:
1986
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Building 39 dedicated as Gordon Stanley Brown Building.
1989
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Full CMOS process qualification of ICL achieved.
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CAFE (Computer Aided Fabrication Environment) software system developed.
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Richard Adler appointed as MTL co-director with Dimitri Antoniadis.
1990
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Process Technology Committee established.
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Rafael Reif appointed as MTL director.
1991
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Process Technology Committee established.
1994
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MTL and NSL spawn Space Nanotechnology Laboratory in Building 37.
1995
- MTL reporting moves to School of Engineering.
1998
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Center for Integrated Circuits and Systems established.
1999
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Bldg. 13 Microlab moves to Building 39 and becomes Exploratory Materials Laboratory (EML).
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Martin Schmidt appointed as MTL director.
2000
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Class 1 Committee report on MTL fab operations issued.
2001
- 4” to 6” wafer diameter conversion completed.
2002
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Microsystems Affiliate Program for industrial users established, renamed Fabrication Facilities Access Program in 2004.
2003
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CORAL fab management software system deployed (replacing CAFE).
2006
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Anantha Chandrakasan appointed as MTL director.
2009
- MUMMS/Cost Recovery deployed enhancing MTL's lab management software suite.
2011
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Vladimir Bulović appointed as MTL director.
2012
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Electron Beam Lithography Facility (EBL) established in Building 24; managed jointly with the Research Laboratory of Electronics (RLE).
2013
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Jesús del Alamo appointed as MTL director.
2014
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MIT.nano, a new 200,000-square-foot center for nanoscience and nanotechnology, announced.
- MTL 30 year celebration takes place.
2018
- MIT.Nano opens, MTL becomes "fabless."
2019
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Hae-Seung (Harry) Lee appointed as MTL director.
2022
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Tomás Palacios appointed as MTL director.