The innovative solutions that enabled High Volume thin film Manufacturing by Pulsed Laser Deposition

MTL Seminar Series
Matthijn Dekkers, Lam Research
Grier B (34-401B)
Open to
MIT Community

Abstract: MEMS devices are critical components in a wide range of applications including automotive, mobile phone, and voice control technologies. Pulsed Laser Deposition (PLD) is a powerful technique to grow thin films for MEMS applications. Thus far PLD has mainly been used in fundamental research on tiny substrates. This talk explains how this technology was scaled to the wafer level and to high volume manufacturing, enabling production of new functional materials for next generation applications.

Matthijn Dekkers headshot

Bio: Matthijn Dekkers received his PhD in Applied Physics at University of Twente in 2007. In the same year he co-founded SolMateS, a company focused on elevating pulsed laser deposition (PLD) as a mainstream deposition technology. As CTO he ran the R&D division that began scaling the PLD technique. In 2022 SolMateS was acquired by Lam Research where he currently holds the role of Director of Engineering in PLD working on process development of new materials.