EUV Lithography: What’s Happening and What’s Next​

MTL Seminar Series
Tony Yen, ASML


Anthony Yen is Vice President and Head of Technology Development Center at ASML, responsible for providing the company with mid- and long-term technology directions and working with customers, peers, universities, and research centers to develop enabling technologies. Prior to joining ASML, he headed Nanopatterning Technology Infrastructure Division at TSMC and played a key role in bringing EUV lithography, including its mask technology, to high-volume production. He received BSEE from Purdue University and SM, EE, PhD, and MBA from MIT. He is a Fellow of the IEEE and SPIE, and was awarded Outstanding Electrical and Computer Engineer by Purdue.