How to Invent (or Not Invent) the First Silicon MEMS Gyroscope

Marc Steven Weinberg, Draper

Marc S. Weinberg holds a Ph.D. in M.E. from M.I.T., where he was a NSF Fellow. Marc co-invented the first useful silicon MEMS gyro, now used in many applications. His work on chemical sensors, balance prostheses, photovoltaics, and atomic clocks have led to start ups or commercial applications. An AIAA Associate Fellow and a professional engineer, Marc holds forty-nine U.S. patents.

Draper reported the first silicon MEMS gyroscope with useful performance in 1992. This work became the basis for the successful Honeywell inertial systems and the starting point for other MEMS angular rate sensors applied to automobiles, gaming, and control. This paper will discuss known factors, unconsidered phenomena, and lucky events that contributed to designing the first tuning fork gyro. In addition to Draper’s ground break-ing development, the materials and operating principles of other successful gyros will be outlined.

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How to Invent (or Not Invent) the First Silicon MEMS Gyroscope

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